产品 > > Alpine-S
In the CVD and Etch process applications, Alpine-S world-class exhaust gas decomposition removal (DRE), and operating and maintenance costs far lower than similar products
HTVS-Alpine is a hybrid system incorporating three well-known abatement technologies: thermal oxidation, absorption, and adsorption, to meticulously abate toxic gases. It is the first of its kind in the PoU abatement industry.
It is built to scrub and polish effluents to perfection. Robust, dependable and comprehensive, the Alpine tool makes certain that the gas that exits the tool is exceptionally clean.
Thermal oxidation occurs as the gases, heated to 1200 degrees Celsius and then cooled, separate contaminants from the gas stream. Absorption of harmful effluents happens as the gas stream moves up the packed bed columns, counter to the water stream coming down. Finally, adsorption takes place as the gas moves through dry resin- filled Uniscrub Canisters where the porous resin abates any remaining toxins.
34.12" L x 40.12" W x 54.12" H
(86.7 cm x 101.9 cm x 137.5 cm)
Weight: 1,350 lbs. (614 kg)
Hot wet catalyst exhaust gas treatment equipment:
Size: 47 "L x37" Wx 75.5 "H (120cm x 90cm x 190cm)