产品 > > Mojave-Single
Inova's "Mojave" dry-type exhaust gas treatment apparatus for decomposition of toxic and corrosive by-products of various types of semiconductor process gases discharged, the process is simple, secure, active and efficient, to provide users with an optimal "PoU" (point of use) treatment program.
Inova Global Corporation's Mojave is a sturdy, compact, dry scrubber that safely and effectively abates toxic and corrosive gas by-products to belowTLV levels. Using innovative control technology, with numerous safety devices, the Mojave remains one of the most effective point-of-use (PoU) dry scrubbers on the market today.
Mojave makes use of chemisorption, a process in which highly porous media attract and absorb gases. Within the media, the contaminant then reacts chemically to convert harmful gases into a solid.
Operation Parameters of Mojave
Maximum Flow from Customer process: 100 liters per minute
Nitrogen Supply Pressure: 80 ~ 90 psig
CDA Flow: 1SCFH
House Ventilation Negative Pressure: 140 cfm
Electrical Power: 120 VAC, 60 Hz, 10 Amps.
The following is a partial list of the toxic chemicals the Mojave scrubs:
PH3, AsH3, NH3, SiH4, B2H6, Cl2, F2, BF3, NF3, ClF3, Br2, BCl3, HCl, HBr, HF, SF6, NOx, Ge, TEOS, TMAl, etc.
Please contact Inova Global Corporation for support services.
Canisters < 140L
Flow < 350 LPM
Dry waste gas treatment equipment:
(71.1cm x 69.8cm x 153.0cm)
Weight: 850 lbs (386 kgs).