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Designed for point-of-use (PoU) abatement, Hercules safely reduces emissions while saving on cost of ownership. The tool efficiently uses water, energy and abatement consumables by means of creative and reliable technology. The heater and vortex ensure capacity to abate gases, and the large heater allows multiple inlets to the tool and for a variety of gas configurations.

Features
Abates pyrophoric, explosive and acid gases.
Continuous operation during the process.
Safety features to ensure a secure and controlled operation.
Audio and visual alarms trigger when alarm conditions arise.
Soft alarms and hard alarms help signify the severity of the alarm.

Main Components
Thermal oxidizers with ceramic heater to oxidize pyrophoric and explosive gases.
Vortex water scrubbers to absorb acid gases, cool the air stream, and entrap particulates in the water stream.
A horizontal water scrubber for increased corrosive scrubbing and solid separation from the liquid stream.
A counter-current packed-bed water scrubber to absorb any remaining acid from the air stream.
Etch/CVD/NF3 Exhaust:
<850 LPM

Hot wet waste gas treatment equipment: 
Strong processing capacity, processing capacity of up to 1000LPM 
Electric heating source, no additional fuel, reduce energy consumption, reduce accidents 
Patent vortex generating means, to prevent clogging, ensure long-term stability 
The use of recycled water design, water consumption is only 1/2 of similar products 
Can be used for a variety of processes: etching, CVD, MOCVD, ion implantation, LCD, photovoltaic and other dimensions 
Size: 41.7 "L x37.7" Wx 77.6 "H (106cm x 95.8cm x 197cm) 
Weight: 1650 lbs (750 kgs).