HTVS-Alpine is a hybrid system incorporating three well-known abatement technologies: thermal oxidation, absorption, and adsorption, to meticulously abate toxic gases. It is the first of its kind in the PoU abatement industry.
It is built to scrub and polish effluents to perfection. Robust, dependable and comprehensive, the Alpine tool makes certain that the gas that exits the tool is exceptionally clean.

Thermal oxidation occurs as the gases, heated to 1200 degrees Celsius and then cooled, separate contaminants from the gas stream. Absorption of harmful effluents happens as the gas stream moves up the packed bed columns, counter to the water stream coming down. Finally, adsorption takes place as the gas moves through dry resin- filled Uniscrub Canisters where the porous resin abates any remaining toxins.
Features

• Comprehensive scrubbing capabilities: two heaters, two vortexes, two packed-bed water scrubbers, and Uniscrub Canister(s).
• Abates pyrophoric, explosive and acid gases.
• Continuous operation during the process.
• Safety features to ensure a secure and controlled operation.
• Audio and visual alarms trigger when alarm conditions arise.
• Soft alarms and hard alarms help signify the severity of the alarm.
• Easy Operation from Touch Screen.
• Extensive temperature monitoring and control.
• Automatic shutdown in case of alarm.

Dimensions
34.12" L x 40.12" W x 54.12" H
(86.7 cm x 101.9 cm x 137.5 cm)
Weight: 1,350 lbs. (614 kg)

Etch/CVD/PFC Exhaust:
<350 LPM
Hot wet catalyst exhaust gas treatment equipment: 

1. Advanced electric heating device, greatly reducing energy consumption 
2. Patent vortex generating means to exclude the risk of clogging the system, reduce the frequency of PM 
3. Patent research and development core catalytic cracking unit, a substantial increase in gas decomposition efficiency 
4. The unique design: the reaction at lower temperatures, reducing energy consumption; recycled water design, consumption is only 1/2 of similar products 
5. On the measured data: acid gases DRE> 99%, PFCs DRE> 95% 
6. According to customer demand for almost all processes: ETCH, CVD, PECVD, LPCVD, MOCVD, Solar, Thin Film, etc.

Size: 47 "L x37" Wx 75.5 "H (120cm x 90cm x 190cm)